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. Author manuscript; available in PMC: 2014 Sep 30.
Published in final edited form as: Nat Protoc. 2014 Feb 27;9(3):694–710. doi: 10.1038/nprot.2014.044
Parameter Value
Etcher model March PX-250
Chamber dimensions 9.0 × 9.0 × 12.0 inches
RF frequency 13.56 MHz
RF power 50 W
DC bias 0 W
Operating pressure 70 mTorr
End point 100%
Time 35 s
BP/RP 70 mTorr
Oxygen flow rate 2 s.c.c.m.
Ambient temperature 22 °C
Ambient humidity 25–45%