Parameter | Value |
---|---|
Etcher model | March PX-250 |
Chamber dimensions | 9.0 × 9.0 × 12.0 inches |
RF frequency | 13.56 MHz |
RF power | 50 W |
DC bias | 0 W |
Operating pressure | 70 mTorr |
End point | 100% |
Time | 35 s |
BP/RP | 70 mTorr |
Oxygen flow rate | 2 s.c.c.m. |
Ambient temperature | 22 °C |
Ambient humidity | 25–45% |