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Schematic illustration of the fabrication process for the magnetically actuated valveless drug delivery device and corresponding optical/SEM images: (a) SU-8 photolithography, (b) formation of a dome-shaped drug reservoir mold, (c) PDMS casting, (d) spin-coating magnetic PDMS membrane on a glass substrate, (e) oxygen plasma treatment, and (f) PDMS-PDMS bonding.
