Table 3.
Response time, recovery time, and hysteresis of different silicon based humidity sensor materials.
| Materials | Condition or Doping Concentration | Response Time (s) | Recovery Time (s) | Hysteresis (%RH) | Ref. |
|---|---|---|---|---|---|
| Silica aerogel | coating viscosity of 15 cp | 41 | 55 | 3.3 | [110] |
| Li-SBA-15 (0.1 Li+) | weight ratio of LiCl to SBA-15 = 0.10 | 21 | 51 | 6 | [111] |
| SBA-16/Li+ | 10 wt % Li | 25 | 120 | 4 | [112] |
| K2CO3-SBA-15 | weight ratio of K2CO3 to SBA-15 = 0.8 | 15 | 50 | - | [113] |
| K-SBA-15 | weight ratio of KCl to SBA-15 = 0.5 | 10 | <25 | 3 | [114] |
| ZnO–SiO2 | molar ratio of ZnO to SiO2 = 1 | 50 | 100 | 2 | [115] |
| nw-SiC/Si-NPA | - | 105 | 85 | 4.5 | [116] |
| Zn2SiO4/Si-NPA | - | 25 | 15 | 1.99 | [117] |
| Li-SBA-15 (0.15 Li+) | weight ratio of LiCl to SBA-15 = 0.15 | 60 | 180 | 3 | [118] |
| Fe-SBA-15 | weight ratio of Fe(NO3)3 to SBA-15 = 0.5 | 20 | 50 | - | [119] |
| Li-MCM-41 | 2 wt % Li | 100 | 150 | - | [120] |
| MgO-SBA-15 | molar ratio of MgO to SBA-15 = 1 | 10 | 20 | 2 | [124] |