Table 1.
Summary of performance.
| General | ||
|
| ||
| Technology | 0.18 μm CMOS 5 M + THKMET | |
| VDD | +5 V | |
| IDDa | 85 μA | |
| Area b | 0.2 mm2 (readout in both sensors) | |
|
| ||
| Sensor Output | ||
|
| ||
| Temperature | Humidity | |
| Sensitivity c | 486/°C | 124/% RH |
| Sensitivity error d | < ±4.3% | < ±14.5% |
|
| ||
| Temperature Sensor | ||
|
| ||
| Area | 0.023 mm2 (part of readout circuit) | |
| Sensitivity | 7753 ppm/°C@37°C | |
| Linearity | Compromise between linearity and sensitivity (see text); ideal for TCIREF = 0. | |
|
| ||
| Capacitive Humidity Sensor | ||
|
| ||
| Version 1 | Version 2 | |
| Area | 1 mm2 | 0.09 mm2 |
| Sensitivity e | 514 ppm/% RH | 584 ppm/% RH |
a
Static quiescent current;
b
readout only;
c
as change in the counter output per measurement unit;
d
maximum variation for the batch (N = 14) of Version 1;
e
obtained by measurement of capacitive changes in Version 1 and by frequency ratio in Version 2.