Table 2.

Comparison of CMOS temperature/humidity sensors.

Reference	Type	Normalized RH Sensitivity (ppm/% RH)	Temperature Resolution (°C)	Current Consumption (μA)	Area (mm2)	CMOS Technology (μm)
[12]	T	n/a	0.05	10	0.12	0.35
[13]	T	n/a	0.03	25	4.5	0.7
[21]	T	n/a	0.25	20	0.18	0.18
[15]	RH	770	n/a	111	4.8	0.6
[22]	RH	1440	n/a	1	0.7	0.15
This work	T/RH	584	7753 ppm/°C a	85	0.29	0.18

^aIn this work, it is the sensitivity that is important.