Table 2.
Devices |
BE ~ 200 nm |
Switching layer (10 nm) |
TE |
|
---|---|---|---|---|
Cu ~ 40 nm | Al ~ 160 nm | |||
S1 |
W |
GeOx |
√ |
√ |
S2 | W | GeOx | × | √ |
Devices |
BE ~ 200 nm |
Switching layer (10 nm) |
TE |
|
---|---|---|---|---|
Cu ~ 40 nm | Al ~ 160 nm | |||
S1 |
W |
GeOx |
√ |
√ |
S2 | W | GeOx | × | √ |