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. Author manuscript; available in PMC: 2014 Nov 18.
Published in final edited form as: Adv Funct Mater. 2009 Mar 9;19(8):1276–1286. doi: 10.1002/adfm.200801561

Table 1.

Details of experiments runs of HEMA-co-EGDA-co-PFM polymerization.

flow rates / sccm
 partial pressure / mTorr
sample HEMA EGDA PFM TBPO N2 HEMA EGDA PFM
HE4P 0.30 0.11 0.04 0.15 1.40 38 14 5
HE2P 0.30 0.08 0.04 0.15 1.45 38 10 5
HE1P 0.30 0.06 0.04 0.15 1.47 38 8 5