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. 2014 Oct 13;14(11):6356–6360. doi: 10.1021/nl5028183

Figure 2.

Figure 2

Coaxial metamaterials fabrication. (a) Schematic overview of the fabrication process: 1. EBL of HSQ on Si membrane. 2. Transfer structures into Si substrate with RIE. 3. Evaporate silver using a combination of EBPVD and Ar+ irradiance. 4. Polish the surface with FIB. (b) SEM images taken after different steps in the fabrication process. 1. Hollow pillars of HSQ after the EBL process. The walls are almost transparent for 5 keV electrons, which were used to take this image. 2. Si rings after RIE and HF dip. 3. Conformal deposition of evaporated silver. 4. Top view SEM image of the final metamaterial: Si appears as dark rings and is surrounded by silver. The inset shows a cross-section of the final metamaterial. The Si ring walls appear as very narrow dark lines in between the silver. Platinum was deposited in order to make the cross-section. The scale bar represents 500 nm.