Table 1. Dimensions of the Fabricated Metamaterial Fields as Measured from SEM Images^a.

sample #	Si cylinder outer diameter (nm)	coax pitch (nm)	Si cylinder thickness (nm)	metamaterial thickness (nm)	silicon support thickness (nm)
1	168	250	15	91	49
2	168	250	13	43	88
3	163	200	13	40	105
4	166	300	13	52	74
5	168	250	15	66	66
6	150	300	15	137	40

^aLayer thicknesses were measured with SEM after making a FIB cross-section. The corresponding SEM images of samples 1–5 are shown in Figure 4b; a cross-section of sample 6 is shown in the inset of Figure 6.