Table 1.
Parameter | kINPen | Surface DBD | Surface DBD | Volume DBD |
---|---|---|---|---|
Process Gas | Argon | Ambient Air | Argon | Argon |
Voltage | 2–6 kV | 10 kV | 3.5 kV | 9–10 kV |
Applied Frequency | 1.1 MHz | 20 kHz | 21 kHz | 33 kHz |
Plasma on/off-time | --- | 0.413/1.223 s | 0.413/1.223 | --- |
Gas flow (Argon) | 3.8 sl/min | --- | 0,5 sl/min | 0.5 sl/min |
Energy per min | < 60 J | 18 J | 8.25 J | 360 J |