U11	U22	U33	U12	U13	U23
C1	0.0719 (18)	0.085 (2)	0.0334 (12)	0.0407 (17)	0.0004 (12)	0.0089 (13)
C2	0.095 (2)	0.079 (2)	0.0475 (16)	0.0299 (19)	0.0186 (15)	0.0296 (15)
C3	0.0751 (18)	0.0529 (15)	0.0402 (13)	0.0083 (13)	0.0088 (12)	0.0163 (11)
C4	0.0315 (10)	0.0396 (11)	0.0348 (10)	0.0151 (8)	0.0040 (8)	0.0098 (8)
C5	0.076 (2)	0.0498 (15)	0.0523 (16)	−0.0029 (14)	−0.0110 (14)	0.0120 (12)
C6	0.099 (3)	0.069 (2)	0.0506 (18)	0.0008 (19)	−0.0216 (17)	−0.0003 (16)
C7	0.0246 (9)	0.0292 (9)	0.0363 (10)	0.0085 (7)	0.0058 (7)	0.0110 (8)
C8	0.0261 (9)	0.0363 (10)	0.0398 (10)	0.0112 (8)	0.0095 (8)	0.0122 (8)
C9	0.0228 (8)	0.0364 (10)	0.0361 (10)	0.0107 (7)	0.0095 (7)	0.0124 (8)
C10	0.0255 (9)	0.0331 (9)	0.0325 (9)	0.0112 (7)	0.0066 (7)	0.0126 (8)
C11	0.0262 (10)	0.0453 (12)	0.0516 (13)	0.0079 (9)	0.0099 (9)	0.0027 (10)
C12	0.0343 (10)	0.0374 (10)	0.0370 (10)	0.0163 (8)	0.0061 (8)	0.0123 (8)
N1	0.0207 (7)	0.0351 (9)	0.0416 (9)	0.0079 (6)	0.0086 (6)	0.0094 (7)
N2	0.0237 (8)	0.0284 (8)	0.0552 (11)	0.0069 (6)	0.0101 (7)	0.0096 (7)
O1	0.0303 (8)	0.0385 (8)	0.0734 (12)	0.0151 (6)	0.0150 (7)	0.0103 (8)
O2	0.0333 (8)	0.0521 (10)	0.0681 (11)	0.0229 (7)	0.0135 (7)	0.0155 (8)
O3	0.0431 (9)	0.0336 (8)	0.0738 (12)	0.0180 (7)	−0.0026 (8)	0.0034 (8)
C13	0.071 (6)	0.051 (6)	0.116 (9)	0.039 (4)	0.008 (6)	−0.001 (5)
C14	0.100 (5)	0.041 (3)	0.171 (9)	0.017 (3)	0.030 (5)	−0.003 (4)
C13A	0.077 (14)	0.052 (10)	0.063 (8)	0.048 (10)	−0.016 (7)	−0.009 (7)
C14A	0.18 (2)	0.138 (18)	0.075 (9)	0.115 (18)	0.028 (9)	0.000 (9)
Cl1	0.1383 (10)	0.1531 (11)	0.0355 (4)	0.0742 (8)	0.0001 (5)	0.0144 (5)
Cl2	0.0426 (3)	0.0510 (4)	0.0510 (3)	0.0153 (3)	−0.0023 (2)	0.0100 (3)