| U11 | U22 | U33 | U12 | U13 | U23 | |
| N1 | 0.0524 (17) | 0.0385 (13) | 0.0546 (15) | −0.0295 (12) | −0.0120 (12) | −0.0062 (11) |
| O1 | 0.0498 (14) | 0.0351 (11) | 0.0876 (17) | −0.0160 (10) | −0.0029 (12) | −0.0176 (11) |
| C1 | 0.0389 (16) | 0.0255 (13) | 0.0378 (15) | −0.0145 (12) | −0.0079 (12) | −0.0016 (11) |
| O2 | 0.0730 (16) | 0.0339 (11) | 0.0677 (14) | −0.0277 (11) | −0.0187 (12) | −0.0071 (10) |
| N2 | 0.0548 (16) | 0.0283 (11) | 0.0403 (14) | −0.0212 (11) | −0.0092 (11) | 0.0015 (10) |
| C2 | 0.0378 (16) | 0.0297 (13) | 0.0389 (15) | −0.0173 (12) | −0.0088 (12) | −0.0001 (11) |
| O3 | 0.0655 (15) | 0.0392 (11) | 0.0468 (12) | −0.0257 (10) | −0.0143 (10) | −0.0053 (9) |
| C3 | 0.0392 (16) | 0.0349 (14) | 0.0392 (15) | −0.0200 (13) | −0.0086 (12) | 0.0029 (12) |
| O4 | 0.0744 (16) | 0.0425 (11) | 0.0401 (12) | −0.0228 (11) | −0.0075 (10) | 0.0044 (9) |
| C4 | 0.0446 (19) | 0.0390 (16) | 0.0507 (18) | −0.0197 (14) | −0.0065 (14) | −0.0108 (14) |
| F | 0.0659 (15) | 0.131 (2) | 0.0963 (18) | −0.0211 (15) | −0.0317 (13) | 0.0148 (15) |
| C5 | 0.0440 (19) | 0.0439 (17) | 0.063 (2) | −0.0142 (15) | 0.0002 (15) | −0.0118 (15) |
| C6 | 0.0383 (19) | 0.055 (2) | 0.067 (2) | −0.0171 (16) | −0.0064 (16) | 0.0020 (17) |
| C7 | 0.0432 (19) | 0.0553 (19) | 0.067 (2) | −0.0292 (16) | −0.0115 (16) | 0.0039 (16) |
| C8 | 0.0422 (17) | 0.0407 (16) | 0.0422 (16) | −0.0233 (14) | −0.0094 (13) | 0.0029 (13) |
| C9 | 0.0433 (17) | 0.0332 (14) | 0.0400 (16) | −0.0205 (13) | −0.0111 (13) | 0.0015 (12) |
| C10 | 0.057 (2) | 0.0320 (14) | 0.0411 (16) | −0.0232 (14) | −0.0096 (14) | 0.0026 (12) |
| C11 | 0.058 (2) | 0.047 (2) | 0.108 (3) | −0.0091 (18) | 0.003 (2) | −0.020 (2) |
| C12 | 0.0289 (14) | 0.0286 (13) | 0.0399 (15) | −0.0149 (11) | −0.0085 (12) | −0.0012 (11) |
| C13 | 0.0305 (15) | 0.0307 (14) | 0.0413 (16) | −0.0156 (12) | −0.0066 (12) | −0.0027 (12) |
| C14 | 0.0461 (18) | 0.0370 (15) | 0.0437 (17) | −0.0187 (14) | −0.0076 (13) | 0.0002 (13) |
| C15 | 0.064 (2) | 0.0522 (19) | 0.0421 (17) | −0.0270 (17) | −0.0089 (15) | −0.0080 (15) |
| C16 | 0.067 (2) | 0.0413 (17) | 0.055 (2) | −0.0216 (16) | −0.0093 (16) | −0.0156 (15) |
| C17 | 0.056 (2) | 0.0346 (15) | 0.058 (2) | −0.0204 (15) | −0.0095 (15) | −0.0068 (14) |
| C18 | 0.0351 (16) | 0.0317 (14) | 0.0451 (17) | −0.0133 (12) | −0.0080 (13) | −0.0043 (12) |
| C19 | 0.0376 (16) | 0.0297 (13) | 0.0384 (15) | −0.0174 (12) | −0.0070 (12) | −0.0028 (12) |
| C20 | 0.0383 (17) | 0.0363 (15) | 0.0414 (16) | −0.0180 (13) | −0.0078 (13) | −0.0015 (13) |
| C21 | 0.088 (3) | 0.069 (2) | 0.0409 (19) | −0.031 (2) | −0.0089 (18) | 0.0063 (16) |
| C22 | 0.0415 (17) | 0.0274 (13) | 0.0429 (16) | −0.0155 (12) | −0.0075 (13) | −0.0046 (12) |
| C23 | 0.0471 (19) | 0.0438 (16) | 0.0451 (18) | −0.0196 (14) | −0.0083 (14) | 0.0030 (14) |
| C24 | 0.0472 (19) | 0.0567 (19) | 0.054 (2) | −0.0121 (16) | −0.0195 (16) | 0.0022 (16) |
| C25 | 0.078 (3) | 0.062 (2) | 0.048 (2) | −0.023 (2) | −0.0242 (19) | 0.0152 (16) |
| C26 | 0.075 (3) | 0.072 (2) | 0.052 (2) | −0.037 (2) | −0.0126 (18) | 0.0107 (18) |
| C27 | 0.0469 (19) | 0.0564 (19) | 0.0498 (19) | −0.0263 (16) | −0.0105 (15) | 0.0107 (15) |
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