Table 1.
Designed and measured microrobot sizes
| Design(a)[μm] | I (I′) | II (II′) | III (III′) | IV (IV′) |
|---|---|---|---|---|
| Length | 153.98 | 144.20 | 154.40 | 156.60 |
| (157.00)(b) | (147.20) | (157.40) | (159.60) | |
| Diameter | 78.00 | 73.00 | 73.00 | 73.00 |
| (81.02) | (76.00) | (76.00) | (76.00) | |
| Line width | 1.98 | 1.98 | 1.98 | 1.98 |
| (5.08) | (5.08) | (5.08) | (5.08) | |
| Pore size | 13.22 | 16.00 | 20.00 | 24.00 |
| (10.20) | (13.00) | (17.00) | (21.00) |
(a)
Each microrobot design has two shapes: cylindrical (I, II, III, and IV), and hexahedral (I′, II′, III′, and IV′). The diameter of the cylindrical shape of the microrobots corresponds to the width or height of the hexahedral-shaped microrobots;
(b)
The measured values for Type I were actually measured. The other values, Type I′, II, II′, III, III′, IV, and IV′ are the expected values based on the Type I measurement (see Figure S2).