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. Author manuscript; available in PMC: 2014 Dec 10.
Published in final edited form as: J Micromech Microeng. 2010 Jul;20(7):075016. doi: 10.1088/0960-1317/20/7/075016

Figure 13.

Figure 13

Effects of increasing actuation leg length on blocking force and natural frequency, for nominal film thicknesses and 20 V input.