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. Author manuscript; available in PMC: 2014 Dec 10.
Published in final edited form as: J Micromech Microeng. 2010 Jul;20(7):075016. doi: 10.1088/0960-1317/20/7/075016

Table 2.

Constant beam parameters.

Quantity Units Estimate
Mcoef,1 N m 0.082
Mcoef,2 N m 1.9
(EI)comp,1 N m2 1.1 × 10−12
(EI)comp,2 N m2 5.5 × 10−12
ȳ1 μm 0.02
ȳ2 μm 0.48
W μm 70
M mg 0.049