Skip to main content
. Author manuscript; available in PMC: 2014 Dec 10.
Published in final edited form as: J Micromech Microeng. 2014 Jul;24(7):075017. doi: 10.1088/0960-1317/24/7/075017

Figure 1.

Figure 1

Scanning electron microscope image of a prototype scanning stage with notation labelled for beams and legs, where Beam 4 for each leg is the closest beam to the stage.