. 2015 Jan 1;22(Pt 1):76–85. doi: 10.1107/S1600577514024412

Table 1. The average energy E _sp of the sputtered particles was determined by TRIDYN simulations. From this, the energy-dependent mean free path at p = 0.2Pa and p = 4Pa was calculated. The fraction of the sputtered particles arriving on the substrate N/N ₀ was simulated using SIMTRA .

		MFP (cm)	MFP (cm)	N/N ₀ (%)	N/N ₀ (%)
Element	E _sp (eV)	(0.2Pa)	(4Pa)	(0.2Pa)	(4Pa)
C	12.26	20.11	1.01	0.0155	0.0026
V	8.08	18.44	0.92	0.0142	0.0027

Table 1. The average energy E sp of the sputtered particles was determined by TRIDYN simulations. From this, the energy-dependent mean free path at p = 0.2Pa and p = 4Pa was calculated. The fraction of the sputtered particles arriving on the substrate N/N 0 was simulated using SIMTRA .