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. 2014 Nov 25;14(12):22199–22207. doi: 10.3390/s141222199

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© 2014 by the authors; licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).

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Figure 2. — Optical images of piezoelectric sensor unit. The sensors consisted of Si/Ta/Pt/PZT/Pt/Au, and the surface was passivated using a SiO₂ layer. A US 10 cent coin (17.9 mm in diameter) is shown as a reference for the sensor size.