Figure 1.

Experimental geometry. (a) SEM micrograph of array structure, tilted at 52°, taken on the gold side of an array of eight parallel microbeams (beam length: 18 μm; thickness: 50 nm Si₃N₄, 110 nm Au; beam widths: 475 to 550 nm; gap width: 20 nm). (b) Schematic cross section of the nanomechanical beam array. Red spots indicate plasmonic Fabry–Pérot resonances excited in the slits between the Au layers by a 1550 nm CW laser. (c) Frequency spectrum of light intensity transmitted through the array, showing five distinct resonances caused by five of eight nanomechanical beams in the array.