. 2015 Jan 21;2015:396010. doi: 10.1155/2015/396010
Copyright © 2015 Mahbod Sahebi et al.
This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Figure 6.
Schematic of Si species oxolation process.