FIG. 2.

(a) Optical micrograph of the dispenser chip. The close up shows the channel crossing with the nozzle and the electrodes. To the right a photograph of the entire chip can be seen, with its fluidic inlet and contact pads for electrical interfacing. (b) Schematic of the cross-section A–A, as indicated in (a). The chip consists of a layer stack of silicon, TMMF photoresist and Pyrex glass. (c) Cross-section illustrating the deflection of the silicon membrane by a piezo stack actuator to dispense droplets on demand.