U11	U22	U33	U12	U13	U23
O1	0.0203 (4)	0.0298 (5)	0.0183 (5)	−0.0022 (3)	0.0056 (3)	−0.0011 (4)
O2	0.0176 (4)	0.0350 (5)	0.0221 (5)	−0.0004 (3)	0.0075 (4)	0.0005 (4)
O3	0.0169 (4)	0.0267 (5)	0.0214 (5)	−0.0016 (3)	0.0072 (3)	−0.0031 (3)
O4	0.0215 (5)	0.0205 (5)	0.0501 (7)	−0.0025 (4)	0.0055 (4)	0.0081 (4)
O5	0.0218 (4)	0.0175 (4)	0.0219 (5)	0.0011 (3)	0.0019 (3)	−0.0010 (3)
N1	0.0137 (5)	0.0192 (5)	0.0172 (5)	−0.0005 (4)	0.0031 (4)	−0.0007 (4)
C1	0.0180 (6)	0.0152 (6)	0.0189 (7)	0.0001 (4)	0.0055 (5)	0.0008 (4)
C2	0.0169 (6)	0.0160 (6)	0.0222 (7)	0.0003 (4)	0.0055 (5)	0.0006 (5)
C3	0.0180 (6)	0.0149 (5)	0.0190 (6)	0.0000 (4)	0.0043 (5)	0.0012 (4)
C4	0.0180 (6)	0.0196 (6)	0.0234 (7)	−0.0004 (4)	0.0054 (5)	0.0014 (5)
C5	0.0185 (6)	0.0224 (6)	0.0226 (7)	−0.0017 (5)	−0.0004 (5)	0.0007 (5)
C6	0.0250 (6)	0.0207 (6)	0.0180 (6)	−0.0017 (5)	0.0036 (5)	−0.0004 (5)
C7	0.0206 (6)	0.0178 (6)	0.0202 (6)	−0.0010 (4)	0.0069 (5)	−0.0003 (4)
C8	0.0181 (6)	0.0138 (5)	0.0198 (6)	−0.0005 (4)	0.0039 (5)	0.0002 (4)
C9	0.0180 (6)	0.0146 (5)	0.0198 (6)	−0.0006 (4)	0.0060 (5)	−0.0006 (4)
C10	0.0157 (6)	0.0203 (6)	0.0174 (6)	−0.0002 (4)	0.0024 (4)	0.0001 (4)
C11	0.0177 (6)	0.0207 (6)	0.0237 (7)	−0.0003 (5)	0.0022 (5)	0.0039 (5)
C12	0.0178 (6)	0.0202 (6)	0.0257 (7)	−0.0012 (5)	0.0031 (5)	0.0000 (5)
C13	0.0203 (6)	0.0192 (6)	0.0423 (8)	0.0017 (5)	0.0042 (5)	0.0014 (6)
C14	0.0177 (6)	0.0261 (7)	0.0497 (9)	0.0029 (5)	0.0058 (6)	−0.0034 (6)
C15	0.0188 (6)	0.0264 (7)	0.0508 (9)	−0.0049 (5)	0.0107 (6)	−0.0036 (6)
C16	0.0222 (6)	0.0189 (6)	0.0398 (8)	−0.0028 (5)	0.0083 (5)	−0.0010 (5)
C17	0.0183 (6)	0.0195 (6)	0.0225 (7)	−0.0007 (5)	0.0039 (5)	−0.0019 (5)
C18	0.0177 (6)	0.0180 (6)	0.0157 (6)	−0.0019 (4)	0.0025 (4)	−0.0035 (4)