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(a) Gratings with 10 μm ridge and 2 μm grooves, (b) angles with 10 μm ridge and 10 μm grooves, (c) circles with 10 μm ridge and 5 μm grooves, (d) 10 × 10 μm2 dots with 10 μm spacing, (e) triangles with 5 μm space in Y direction and 10 μm space in X direction, and (f) flat surface. Scale bar: 100 μm.
