| A1-4 |
Gratings |
Straight grating with line width 2, 5, 10, 15 μm, space 2 μm |
| B1-4 |
Circle |
Circle with line width 2, 5, 10, 15 μm, space 5 μm |
| C1-4 |
Dot |
Dot with diameter 2, 5, 10, 15 μm |
| D1-3 |
Grid |
Grid with line width 2, 5, 10 μm, space 2, 5, 10 μm |
| E1-4 |
Square |
Square with line width 2, 5, 10, 15 μm, space 2, 5, 10, 15 μm |
| F1-3 |
Angle |
Angle with line width 2, 5, 10 μm, space 2, 5, 10 μm |
| H1-4 |
Rectangle 1–4 |
Rectangle with Y-space 5 μm, X-space 5, 10, 15, 25 μm |
| H5-8 |
Rectangle 5–8 |
Rectangle with Y-space 10 μm, X-space 5, 10, 15, 25 μm |
| H9-12 |
Rectangle 9–12 |
Rectangle with Y-space 15 μm, X-space 5, 10, 15, 25 μm |
| I1-3 |
Triangle 1–3 |
Triangle with Y-space 0 μm, X-space 5, 10, 20 μm |
| I4-7 |
Triangle 4–7 |
Triangle with Y-space 5 μm, X-space 0, 5, 10, 20 μm |
| I8-11 |
Triangle 8–11 |
Triangle with Y-space 10 μm, X-space 0, 5, 10, 20 μm |
| I12-15 |
Triangle 12–15 |
Triangle with Y-space 20 μm, X-space 0, 5, 10, 20 μm |
| J1-4 |
Long triangle 1–4 |
Long triangle with Y-space 0 μm, X-space 0, 5, 10, 20 μm |
| J5-8 |
Long triangle 5–8 |
Long triangle with Y-space 5 μm, X-space 0, 5, 10, 20 μm |
| J9-12 |
Long triangle 9–12 |
Long triangle with Y-space 10 μm, X-space 0, 5, 10, 20 μm |
| K1-2 |
Directional triangle |
Directional triangle with space 1, 5 μm |
| L1 |
Semi-circle |
Semi-circle with diameter 5 μm |
| M1 |
Gradient line 1 |
Gradient line with decreasing width |
| M2 |
Gradient line 2 |
Gradient line with decreasing width but increasing gap |
| N1 |
Flat |
Flat pattern |
