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SEM images of CF4 plasma-etched glass surfaces and soda-lime glass cross-sections with varied CF4 plasma etching duration: (a) 15, (b) 30, and (c) 60 min. Schematic representation and SEM cross-sectional images of SiO2-coated glasses with varied CF4 plasma duration: (d) 15, (e) 30, and (f) 60 min. Scale bar is 500 nm. (g) Roughness measured on glasses with (blue) and without (black) SiO2 layer.
