Table 2.
Finite element model of the type used in ansys.
Structure Layer | Model Type |
---|---|
PZT | SOLID5 |
Polyimide | SOLID45 |
PDMS | SOLID45 |
Electrode (Au) | SHELL41 |
Finite element model of the type used in ansys.
Structure Layer | Model Type |
---|---|
PZT | SOLID5 |
Polyimide | SOLID45 |
PDMS | SOLID45 |
Electrode (Au) | SHELL41 |