Table 1.
Design | p-pitch = 264 nm | P-pitch = 792 nm | ||||||
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p-to-s in S-Orientation | s-to-p in P-Orientation | p-to-s in S-Orientation | s-to-p in P-Orientation | |||||
| ||||||||
φ (°) | Contrast | φ (°) | Contrast | φ (°) | Contrast | φ (°) | Contrast | |
NCAI | 80.0 | 63.2 | 0.0 | 13.6 | 80.0 | 192.8 | 0.0 | 15.8 |
NCDAI | 80.0 | 110.1 | 0.0 | 29.6 | 80.0 | 1196.2 | 0.0 | 54.1 |
NCDDAI | 80.0 | 8916.3 | 0.0 | 2902.9 | 80.0 | 172,632.9 | 0.0 | 47,839.7 |
NCTAI | 80.0 | 11.4 | 0.0 | 7.1 | 20.5 | 53.2 | 0.0 | 18.5 |