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. 2015 Feb 12;15(2):4212–4228. doi: 10.3390/s150204212

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© 2015 by the authors; licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).

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Figure 2. — (a) Photo of the peeled-off SU-8 mask layer after the first heat treatment; (b) A photo of the MEA with the sensing areas coated with IrO_x. The sensing film size of each electrode was 50 × 100 μm². The black circle on the top-right electrode of the MEA indicates the area imaged by a scanning electron microscopy in Figure 3b.