FIG. 3.

(a) Microscopic image of the fabricated 2-channel PC biosensor array (prior to SU-8 coating). On the upper channel, a single PC microcavity biosensor with a = 388 nm is located. On the lower channel, PCW filter is connected in series with the PC microcavity biosensor with a = 396 nm. Input and output grating couplers are indicated. SEM images of (b) MMI coupler, (c) subwavelength grating, (d) the PCW filter, and (e) one of the PC microcavity sensors. (d) and (e) omit the central part of the devices and show the two ends of the devices. (f) SEM image of the cross section of the PCW filter coated with SU-8. The PC holes were completely filled by SU-8.