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. 2015 Mar 31;5:9510. doi: 10.1038/srep09510

Figure 1. Analysis and modeling of the FBAR with a polymer support layer architecture.

Figure 1

(a) Schematic of the PI-FBAR architecture, (b) Comparison of acoustic impedance of various materials used in FBAR fabrication, (c) Summary of the displacements in the PE layer and Si in the PI-FBAR architecture as a function of PI layer thickness, (d) Displacements in layers of the PI-FBAR architecture with varying PI thickness, clearly showing the wave is confined and diminishes within the PI layer when its thickness is greater than 9 μm, and no acoustic energy is transmitted to the elastic Si substrate. The thicknesses of the ZnO and Si layers are 2.0 and 20 μm, respectively for the modeling. (Note Figure 1d is not based on an exact 2D figure, but rather viewed from a wide angle towards to narrow one. For clearer view, please see the 3D figures in Figure S2b in SI).