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. 2015 Jan 27;5(1):37–50. doi: 10.3390/bios5010037

Figure 1.

Figure 1

(a) Fabrication process of a piezoresistive microcantilever sensor; (b) an SEM image of a complete piezoresistive microcantilever biosensor; (c) a photograph of a packaged device; (d) an experimental system setup. PECVD, plasma-enhanced chemical vapor deposition; LPCVD, low-pressure chemical vapor deposition.