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. 2015 Feb 11;10:56. doi: 10.1186/s11671-015-0732-7

Figure 2.

Figure 2

XRD patterns of TiO 2 samples at an RF power of 150 W at working pressures of (a) 3 Pa and (b) 5 Pa, without bias, and (c) 3 Pa at a substrate bias of −50 V.