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Electrical interface parameters
| PE-SA-1 | PE-SA-2 | T-SA-1 | ||
|---|---|---|---|---|
| Before depositiona | Q tot (cm−2) | −9.23 × 1011 | −7.70 × 1011 | −9.93 × 1011 |
| V SB (V) | −0.177 | −0.134 | −0.169 | |
| After deposition | Q tot (cm−2) | −8.93 × 1012 | −5.64 × 1012 | −1.38 × 1012 |
| V SB (V) | −0.546 | −0.499 | −0.192 |
aThe samples before deposition refer to the samples only covered by a-Si:H films. The samples after deposition were annealed at 450°C for 10 min in air.
