Table 1.

Parameters for fly-scan ptychography data recording. The field of view was the same (4 μm×3 μm) as in the step scan. The exposure time per frame was 100 ms, and the focused flux was of the order of 3 × 10⁸ photons/s.

s (nm)	Scan grid (H×V)	Footprint horizontal overlap (%)	Fluence (photons/μm2)
(step)	81×61	51.5	1.24×1010
50	81×61	67.3	1.24×1010
75	54×61	57.8	8.24×109
100	41×61	50.7	6.25×109
125	33×61	45.2	5.03×109
150	27×61	40.7	4.12×109
200	20×61	34.0	3.05×109
250	16×61	29.2	2.44×109
300	13×61	25.6	1.98×109