Table 1. Parameters (critical current, width/pitch) of 16 detectors.

Sample No.	Designed Width/Pitch (nm)	Measured Width/Pitch (nm)	Ic (μA)
1.	50/100	45.5/104	7
2.	50/100	45.0/102	7.1
3.	50/125	45.4/130	7.3
4.	50/125	47.3/129	6.8
5.	50/125	43.8/128	8.2
6.	50/150	42.6/152	7
7.	50/150	49.0/148	6.7
8.	50/200	55.0/201	7.6
9.	50/200	50.0/194	8.9
10.	50/200	42.2/195	9.1
11.	50/200	48.7/203	7.6
12.	50/200	52.0/203	8.9
13.	50/250	57.3/251	8.7
14.	50/250	47.5/241	9.3
15.	50/250	44.0/251	8.2
16.	50/250	50.3/253	7.8