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. 2015 Apr 24;5:9932. doi: 10.1038/srep09932

Figure 13. Cavity affection for stimulated emission on Si QDs embedded in SiOx prepared by using irradiation of electron beam for 15min, in which the Purcell cavity (Q factor: ~2000) is fabricated by PLE process in the device related to Fig. 1.

Figure 13