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. 2015 Apr 24;5:9932. doi: 10.1038/srep09932

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(a) TEM image of Si QDs embedded in Si_yN_x after irradiation under electron beam for 15min on amorphous Si film prepared in nitrogen gas. (b) TEM image of Si–Yb QDs embedded in Si_yN_x after irradiation under electron beam for 20min.