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. 2015 Apr 24;5:9932. doi: 10.1038/srep09932

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(a) TEM image of silicon QDs embedded in Si_yN_x prepared by using irradiation of electron beam for 15min. (b)PL peak near 2 eV on the Si QDs sample prepared in nitrogen with irradiation of electron beam for 15min and annealing at 1050°C for 20min.