Figure 4.
TEM image of an Al/Cu/Ti/TaOx/W structure. (a) HRTEM images of the (b) outside and (c) inside of the via-hole device, as shown in (a). After deposition of a Ti nanolayer, it became TiO2 [29].
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.