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| Optical element | Location (m) | Distance to previous element (m) |
|---|---|---|
| 100nm HFM | 0.900 | |
| 100nm VFM | 0.500 | 0.400 |
| Primary interaction point | 0.000 | 0.500 |
| Be lenses | 1.000 | 1.000 |
| Beam profile monitor | 3.100 | 2.100 |
| Refocused interaction point | 4.746 | 1.646 |
