Table 5.
Properties of metal oxides ZnO, In2O3, indium-tin-oxide (ITO) and SnO2, required for the simulation of stress evolution during Volmer–Weber growth and grain coalescence. CTE, coefficients of thermal expansion.
| Characteristic | ZnO | In2O3 | ITO | SnO2 |
|---|---|---|---|---|
| Young's modulus E (GPa) | 210 [40] | 145 [41] | 116 [42] | 253 [43] |
| Poisson's ratio ν | 0.36 [44] | 0.31 [45] | 0.33 [46] | 0.293 [43] |
| CTE α (K−1) | 3.9 × 10 −6 [37] | 6.7 × 10−6 [37] | 8.5 × 10−6 [47] | 4.0 × 10−6[37] |
| Density ρ (g/cm3) | 5.67 [37] | 7.12 [37] | 7.18 [52] | 6.99 [37] |
| Average grain size D (nm) | 13–16.5 [49] | 10–80 [53,54] | 10–40 [55] | 12–16.5 [56] |
| Melting point (°C) | 2240 [37] | 2190 [37] | 1913 [52] | 1900 [37] |
| Intrinsic stress σi (GPa) | 2.3–3.43 [48,49] | 0.4–1.5 [50] | 2.1–2.3 [42] | 1.5 [51] |