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Surface stress for the metal oxide materials introduced in this study. The average grain radius and island contact angle with the substrate are set to r = 15 nm and θ = 50°, respectively.
| Material: | ZnO | In2O3 | ITO | SnO2 |
|---|---|---|---|---|
| Intrinsic stress σi | 2.3 GPa | 1.0 GPa | 2.1 GPa | 1.5 GPa |
| Surface stress f | 21 J/m2 | 9 J/m2 | 19 J/m2 | 14 J/m2 |
