Figure 6.
SEM images of the fabricated accelerometer device. (a) Accelerometer sensor; (b) U-shaped springs; (c) Inter-digitized sensing electrodes.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.