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. 2015 May 18;5:9827. doi: 10.1038/srep09827

Figure 1. The crystalline silicon-on-insulator (SOI) structure as seen by scanning electron microscope.

Figure 1

(a) Front view. (b) Same as (a), top view; The direction of the ptychography translation Inline graphic (black arrow) and the scanning step Inline graphic are indicated. The projected direction of propagation of the incident beam (white arrow) together with the beam footprint (FWHM of intensity, dotted ellipse) are shown. The gray ellipse corresponds to the beam footprint at the next beam-to-sample position. The (Inline graphic orthogonal laboratory frame is given.