Table 1.
Parameters used in the optimization study. BPSG, borophosphosilicate glass.
| Parameter | Value | Description |
|---|---|---|
| R | 24 µm | resonator radius |
| λ | ∼1540 nm | resonance wavelength |
| nwater | 1.32 | water refractive index (real part) |
| kwater | 1 × 10−4 | water refractive index (imaginary part) [18,31] |
| nSiN | 1.99 | SiNx refractive index (real part) |
| kSiN | 5 × 10−5 | SiNx refractive index (imaginary part) [17,31] |
| nBPSG | 1.46 | BPSG refractive index (real part) |
| kBPSG | 0 | BPSG refractive index (imaginary part) |
| tV | 5 nm | auxiliary layer thickness (for σ) |