Table 3.

Uncertainty estimation results of NSC15_F#1 cantilever.

Inputs	Expectation	Standard Uncertainty	Distribution	Relative Standard Uncertainty	DOF
S	2144.32 mV·μm−1	8.65 mV·nm−1	Normal	0.403%	16.9
U 0	2144.32 mV	0.72 mV	Normal	0.033%	14
D 0	1 μm	0.00153 μm	Normal	0.153%	50
P	1	----	Uniform	0.373%	12.5
m	5.0042 mg	1.90 μg	Normal	0.038%	40.7
Resolution	0	0.03 μg	Uniform	----	50
Reproducibility	0	0.25 μg	Uniform	----	50
Repeated measure	5.004 mg	1.88 μg	Normal	----	39
g	9.8011 m·s−2	0.0010 m·s−2	Uniform	0.010%	50
U	2000 mV	----	----	----	----
Output (k)	52.586 N·m−1	0.213 N·m−1	Normal	0.405%	17.3

k₉₉ = 2.895 U₉₉(k) = k₉₉·u_c(k) = 0.617 N·m⁻¹. k = 52.586 ± 0.617 N·m⁻¹.