Table 1. Volume fractions (%) of MTs and the nominal phase measured from the rocking-curve scans for the series of 45nm GaP/Si samples.

Sample	MT-A	MT-B	MT-C	MT-D	MT-S	NP	NP+MT-S
S1	7.8	6.4	5.2	5.3	24.6 2.5	69.2 7.0	93.8 9.5
S2	4.6	3.4	3.0	3.8	14.8 1.6	62.1 6.8	76.9 8.4
S3	0.4	0.4	0.3	0.2	1.3 1.0	110.3 12.1	111.6 13.1