U11	U22	U33	U12	U13	U23
S1	0.0360 (2)	0.0322 (2)	0.0349 (2)	0.0131 (1)	0.0121 (1)	0.0137 (2)
O1	0.0460 (6)	0.0366 (6)	0.0424 (7)	0.0088 (5)	0.0010 (5)	0.0093 (5)
O2	0.0511 (6)	0.0500 (7)	0.0531 (8)	0.0239 (5)	0.0301 (6)	0.0265 (6)
O3	0.0505 (7)	0.0712 (9)	0.0659 (10)	0.0312 (7)	0.0241 (7)	0.0152 (8)
N1	0.0506 (7)	0.0353 (7)	0.0509 (9)	0.0180 (6)	0.0277 (7)	0.0199 (6)
N2	0.0475 (7)	0.0421 (7)	0.0347 (7)	0.0238 (6)	0.0164 (6)	0.0198 (6)
N3	0.0485 (8)	0.0614 (10)	0.0492 (9)	0.0275 (7)	0.0145 (7)	0.0134 (8)
C1	0.0344 (6)	0.0310 (6)	0.0310 (7)	0.0136 (5)	0.0102 (5)	0.0120 (6)
C2	0.0576 (10)	0.0412 (9)	0.0381 (9)	0.0092 (7)	−0.0054 (7)	0.0189 (8)
C3	0.0529 (9)	0.0367 (8)	0.0428 (10)	0.0026 (7)	−0.0037 (8)	0.0132 (8)
C4	0.0397 (7)	0.0318 (7)	0.0399 (8)	0.0169 (6)	0.0203 (6)	0.0156 (6)
C5	0.0465 (8)	0.0430 (8)	0.0434 (9)	0.0185 (7)	0.0060 (7)	0.0228 (8)
C6	0.0393 (7)	0.0390 (8)	0.0403 (9)	0.0115 (6)	0.0000 (6)	0.0165 (7)
C7	0.0409 (7)	0.0272 (6)	0.0368 (8)	0.0132 (5)	0.0132 (6)	0.0106 (6)
C8	0.0559 (10)	0.0513 (10)	0.0423 (10)	0.0243 (8)	0.0220 (8)	0.0198 (8)
C9	0.0598 (10)	0.0385 (8)	0.0567 (12)	0.0173 (8)	0.0324 (9)	0.0136 (8)
C10	0.0892 (17)	0.0710 (15)	0.0808 (18)	0.0340 (13)	0.0583 (15)	0.0270 (13)
O4	0.0475 (7)	0.0968 (12)	0.0513 (8)	0.0267 (7)	0.0256 (6)	0.0230 (8)
O5	0.0571 (7)	0.0597 (8)	0.0306 (6)	0.0233 (6)	0.0132 (5)	0.0160 (6)
O6	0.0395 (5)	0.0529 (7)	0.0314 (6)	0.0198 (5)	0.0039 (4)	0.0138 (5)
O7	0.0692 (10)	0.171 (2)	0.0830 (13)	0.0813 (13)	0.0218 (9)	0.0526 (13)
O8	0.0515 (8)	0.167 (2)	0.0550 (10)	0.0286 (11)	0.0271 (8)	0.0321 (12)
O9	0.0746 (10)	0.0941 (12)	0.0313 (7)	0.0259 (9)	0.0026 (7)	0.0211 (8)
O10	0.0468 (7)	0.0981 (12)	0.0612 (10)	0.0296 (8)	−0.0061 (7)	0.0238 (9)
N4	0.0382 (7)	0.0850 (12)	0.0393 (9)	0.0244 (8)	0.0082 (6)	0.0079 (8)
N5	0.0474 (8)	0.0447 (8)	0.0376 (8)	0.0141 (6)	−0.0053 (6)	0.0128 (7)
C11	0.0333 (6)	0.0298 (6)	0.0305 (7)	0.0109 (5)	0.0073 (5)	0.0098 (6)
C12	0.0348 (6)	0.0304 (6)	0.0288 (7)	0.0116 (5)	0.0041 (5)	0.0102 (6)
C13	0.0327 (7)	0.0451 (8)	0.0349 (8)	0.0158 (6)	0.0079 (6)	0.0114 (7)
C14	0.0407 (7)	0.0452 (8)	0.0294 (8)	0.0154 (6)	0.0084 (6)	0.0109 (7)
C15	0.0361 (7)	0.0346 (7)	0.0299 (7)	0.0112 (6)	−0.0004 (6)	0.0105 (6)
C16	0.0321 (6)	0.0336 (7)	0.0369 (8)	0.0124 (5)	0.0057 (6)	0.0122 (6)
C17	0.0403 (7)	0.0394 (8)	0.0365 (8)	0.0134 (6)	0.0128 (6)	0.0140 (7)