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(a) Measured single cantilever profile for DS500 and DL500 in OFF and ON states. (b) The phase image of released cantilevers for DS500 unit cell in OFF state shows continuously varying phase information due to increasing out-of-plane deformation. (c) The phase image of DS500 unit cell in ON state, the phase is uniform throughout the cantilever, indicating that the cantilevers are parallel and in physical contact with Si substrate below.
