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(a) In-situ XPS spectra showing the Mo 3d and S 2s core level peak regions before and after remote O2 plasma treatments for various time. (b) In-situ XPS spectra showing the S 2p core level peak regions. (c) Raman spectra before and after the remote O2 plasma treatments. The inset is a zoom of the spectra showing the 
and A1g peaks in MoS2. The blue dotted circle in (c) is used to highlight the peak near 820 cm−1 which is used to estimate the extent of MoS2 oxidation.
